Vacuum arc plasma generation and thin film deposition from a TiB2 cathode
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منابع مشابه
Cathodic Arc Synthesis of Ti-Si-C-N Thin Films Plasma Analysis and Microstructure Formation
ii The cover image is based on a photograph of arc spots moving on the surface of a Ti cathode, taken during the first experimental session in our new PVD research system, Hydra. The explosive plasma generation in the arc spots is central to the cathodic arc deposition technique, studied and used extensively for synthesis in the Thesis. Abstract This Thesis explores the arc deposition process a...
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